Effect of particle interaction on agglomeration of silica-based CMP slurries

A. Sorooshian, R. Ashwani, H. K. Choi, M. Moinpour, A. Oehler, A. Tregub

Research output: Contribution to journalConference article

16 Scopus citations

Fingerprint Dive into the research topics of 'Effect of particle interaction on agglomeration of silica-based CMP slurries'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy