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Effect of retaining ring slot design on slurry film thickness during CMP
Xiaomin Wei, Yasa Adi Sampurno, Yun Zhuang, Roy Dittler, Anand Meled, Jiang Cheng, Christopher Wargo, Ralph Stankowski, Ara Philipossian
Research output: Contribution to journal › Article › peer-review
8
Scopus
citations