Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter

Wayne P. Kelly, Donald C. Grant, Joseph Zahka, Wayne Huang, Srini Raghavan

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

The surface properties of a filter were chosen to have complete retention of both PSL and silicon nitride particles in a wide pH range of HF. Particles were removed by non-sieving mechanisms, allowing the filter to have large pores resulting in high flow rate.

Original languageEnglish (US)
Title of host publicationDiffusion and Defect Data Pt.B: Solid State Phenomena
PublisherScitec Publications Ltd.
Pages271-274
Number of pages4
Volume76-77
StatePublished - 2000
Event5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000) - Ostend, Belgium
Duration: Sep 18 2000Sep 20 2000

Other

Other5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000)
CityOstend, Belgium
Period9/18/009/20/00

Fingerprint

relativistic electron beams
Surface charge
Silicon nitride
Surface properties
Flow rate
filters
Fluids
fluids
silicon nitrides
surface properties
nitrides
flow velocity
porosity
silicon nitride

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Kelly, W. P., Grant, D. C., Zahka, J., Huang, W., & Raghavan, S. (2000). Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter. In Diffusion and Defect Data Pt.B: Solid State Phenomena (Vol. 76-77, pp. 271-274). Scitec Publications Ltd..

Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter. / Kelly, Wayne P.; Grant, Donald C.; Zahka, Joseph; Huang, Wayne; Raghavan, Srini.

Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 76-77 Scitec Publications Ltd., 2000. p. 271-274.

Research output: Chapter in Book/Report/Conference proceedingChapter

Kelly, WP, Grant, DC, Zahka, J, Huang, W & Raghavan, S 2000, Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter. in Diffusion and Defect Data Pt.B: Solid State Phenomena. vol. 76-77, Scitec Publications Ltd., pp. 271-274, 5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), Ostend, Belgium, 9/18/00.
Kelly WP, Grant DC, Zahka J, Huang W, Raghavan S. Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter. In Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 76-77. Scitec Publications Ltd. 2000. p. 271-274
Kelly, Wayne P. ; Grant, Donald C. ; Zahka, Joseph ; Huang, Wayne ; Raghavan, Srini. / Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter. Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 76-77 Scitec Publications Ltd., 2000. pp. 271-274
@inbook{b37b918757134f46bf21d5755ecc4e81,
title = "Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter",
abstract = "The surface properties of a filter were chosen to have complete retention of both PSL and silicon nitride particles in a wide pH range of HF. Particles were removed by non-sieving mechanisms, allowing the filter to have large pores resulting in high flow rate.",
author = "Kelly, {Wayne P.} and Grant, {Donald C.} and Joseph Zahka and Wayne Huang and Srini Raghavan",
year = "2000",
language = "English (US)",
volume = "76-77",
pages = "271--274",
booktitle = "Diffusion and Defect Data Pt.B: Solid State Phenomena",
publisher = "Scitec Publications Ltd.",

}

TY - CHAP

T1 - Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter

AU - Kelly, Wayne P.

AU - Grant, Donald C.

AU - Zahka, Joseph

AU - Huang, Wayne

AU - Raghavan, Srini

PY - 2000

Y1 - 2000

N2 - The surface properties of a filter were chosen to have complete retention of both PSL and silicon nitride particles in a wide pH range of HF. Particles were removed by non-sieving mechanisms, allowing the filter to have large pores resulting in high flow rate.

AB - The surface properties of a filter were chosen to have complete retention of both PSL and silicon nitride particles in a wide pH range of HF. Particles were removed by non-sieving mechanisms, allowing the filter to have large pores resulting in high flow rate.

UR - http://www.scopus.com/inward/record.url?scp=0034498262&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034498262&partnerID=8YFLogxK

M3 - Chapter

VL - 76-77

SP - 271

EP - 274

BT - Diffusion and Defect Data Pt.B: Solid State Phenomena

PB - Scitec Publications Ltd.

ER -