Abstract
In this study, pad surface contact area measurement was performed using laser confocal microscopy at elevated temperatures under dry and static condition to illustrate the effect of temperature on the mechanical contacts in chemical mechanical planarization. Pad surface contact area and contact density were measured for a Cabot Microelectronics Corporation D100 pad sample at 27.6 kPa with a custom-made sample holder that was designed to heat the pad sample during the measurement. When the pad surface temperature increased from 25 to 45°d asperities became much softer and resulted in a significant increase (from 0.029% to 0.092%) in the pad contact area percentage while the contact density remained in the same range.
| Original language | English (US) |
|---|---|
| Journal | ECS Solid State Letters |
| Volume | 1 |
| Issue number | 2 |
| DOIs | |
| State | Published - 2012 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
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Effect of temperature on pad surface contact area in chemical mechanical planarization. / Jiao, Y.; Zhuang, Y.; Liao, X.; Borucki, L. J.; Naman, A.; Philipossian, Ara.
In: ECS Solid State Letters, Vol. 1, No. 2, 2012.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Effect of temperature on pad surface contact area in chemical mechanical planarization
AU - Jiao, Y.
AU - Zhuang, Y.
AU - Liao, X.
AU - Borucki, L. J.
AU - Naman, A.
AU - Philipossian, Ara
PY - 2012
Y1 - 2012
N2 - In this study, pad surface contact area measurement was performed using laser confocal microscopy at elevated temperatures under dry and static condition to illustrate the effect of temperature on the mechanical contacts in chemical mechanical planarization. Pad surface contact area and contact density were measured for a Cabot Microelectronics Corporation D100 pad sample at 27.6 kPa with a custom-made sample holder that was designed to heat the pad sample during the measurement. When the pad surface temperature increased from 25 to 45°d asperities became much softer and resulted in a significant increase (from 0.029% to 0.092%) in the pad contact area percentage while the contact density remained in the same range.
AB - In this study, pad surface contact area measurement was performed using laser confocal microscopy at elevated temperatures under dry and static condition to illustrate the effect of temperature on the mechanical contacts in chemical mechanical planarization. Pad surface contact area and contact density were measured for a Cabot Microelectronics Corporation D100 pad sample at 27.6 kPa with a custom-made sample holder that was designed to heat the pad sample during the measurement. When the pad surface temperature increased from 25 to 45°d asperities became much softer and resulted in a significant increase (from 0.029% to 0.092%) in the pad contact area percentage while the contact density remained in the same range.
UR - http://www.scopus.com/inward/record.url?scp=84880413483&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84880413483&partnerID=8YFLogxK
U2 - 10.1149/2.016202ssl
DO - 10.1149/2.016202ssl
M3 - Article
VL - 1
JO - ECS Solid State Letters
JF - ECS Solid State Letters
SN - 2162-8742
IS - 2
ER -