Effects of annealing on the local structure of Fe and Co in CoFeB/MgO/CoFeB tunnel junctions: An extended x-ray-absorption fine structure study

Abdul K. Rumaiz, J. C. Woicik, W. G. Wang, Jean Jordan-Sweet, G. H. Jaffari, C. Ni, John Q. Xiao, C. L. Chien

Research output: Contribution to journalArticle

25 Scopus citations

Abstract

Extended x-ray-absorption fine structure (EXAFS) was used to study the evolution of the local structure of Fe and Co as a function of annealing time in CoFeB/MgO/CoFeB magnetic tunnel junctions. EXAFS indicates B depletion and crystallization of the CoFeB layers within a few seconds of the post growth high temperature anneal. The decrease in first-shell Debye-Waller factor and hence the increase in structural order during annealing explains the increase in tunnel magnetoresistance observed as a result of post deposition annealing.

Original languageEnglish (US)
Article number112502
JournalApplied Physics Letters
Volume96
Issue number11
DOIs
StatePublished - Mar 26 2010
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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