Fingerprint Dive into the research topics of 'Effects of disk design and kinematics of conditioners on process hydrodynamics during copper CMP'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Effects of disk design and kinematics of conditioners on process hydrodynamics during copper CMP
Zhonglin Li, Hyosang Lee, Len Borucki, Chris Rogers, Ryozo Kikuma, Naoki Rikita, Kenji Nagasawa, Ara Philipossian
Research output: Contribution to journal › Article › peer-review
22
Scopus
citations