Effects of disk design and kinematics of conditioners on process hydrodynamics during copper CMP

Zhonglin Li, Hyosang Lee, Len Borucki, Chris Rogers, Ryozo Kikuma, Naoki Rikita, Kenji Nagasawa, Ara Philipossian

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Fingerprint

Dive into the research topics of 'Effects of disk design and kinematics of conditioners on process hydrodynamics during copper CMP'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science