Effects of high-temperature rapid thermal annealing on the residual stress of LPCVD-polysilicon thin films

Xin Zhang, Tong Yi Zhang, Man Wong, Yitshak Zohar

Research output: Contribution to conferencePaper

10 Scopus citations

Abstract

The effects of regular furnace and high-temperature rapid thermal annealing (RTA) on the residual stress of LPCVD-polysilicon thin films were investigated. The as-deposited 0.5 μm thick polysilicon films had an initial compressive stress of about 340 MPa, and the residual stress was relaxed quickly after a few cycles of RTA at the higher temperatures. The stress variation with annealing time at temperatures of 900-1150 °C was analyzed. Using X-ray diffraction (XRD), micro-Raman spectroscopy and transmission electron microscopy (TEM), the changes in the microstructure of the thin films, induced by the RTA, during the stress relaxation were studied. Compared to regular furnace annealing, rapid thermal annealing can reduce stress in a short time and is an effective method for releasing the residual stress in polysilicon thin films.

Original languageEnglish (US)
Pages535-540
Number of pages6
StatePublished - Jan 1 1997
Externally publishedYes
EventProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn
Duration: Jan 26 1997Jan 30 1997

Other

OtherProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
CityNagoya, Jpn
Period1/26/971/30/97

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Zhang, X., Zhang, T. Y., Wong, M., & Zohar, Y. (1997). Effects of high-temperature rapid thermal annealing on the residual stress of LPCVD-polysilicon thin films. 535-540. Paper presented at Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, Nagoya, Jpn, .