Effects of object roughness on partially coherent image formation

Neil A. Beaudry, Thomas D Milster

Research output: Contribution to journalArticle

19 Scopus citations

Abstract

Phase perturbations in the object plane of a partially coherent imaging system are found to produce artifacts in the aerial image. It is demonstrated that phase perturbations of as little as λ/30 rms can produce visible deformation in the final image for modest coherence factors, such as σc = 0.4. A combination of simulation and experiment is used to demonstrate the effects. Application to line-edge roughness in lithography is described.

Original languageEnglish (US)
Pages (from-to)454-456
Number of pages3
JournalOptics Letters
Volume25
Issue number7
Publication statusPublished - Apr 1 2000

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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