Electrochemical impedance spectroscopic characterization of hydrophobic coatings deposited onto pre-oxidized silicon

Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, Slobodan Petrovic, David J. Monk, Ray Roop

Research output: Contribution to journalConference articlepeer-review

Abstract

Water-dispersible organosilanes have been used to apply highly hydrophobic coatings onto pre-oxidized silicon with the ultimate goal of using this technique to prevent or reduce release as well as in-use stiction in micro-electromechanical structures. The ability of the hydrophobic films to provide a barrier to liquid penetration has been investigated by electrochemical impedance spectroscopy in hydrofluoric acid (HF) solutions. The results have been analyzed using equivalent circuits.

Original languageEnglish (US)
Pages (from-to)211-214
Number of pages4
JournalSolid State Phenomena
Volume92
DOIs
StatePublished - 2003
EventThe International Symposium on Ultra Clean Processing of Silicon Surfaces V - Ostend, Belgium
Duration: Sep 16 2002Sep 18 2002

Keywords

  • Electrochemical impedance spectroscopy
  • Hydrophobic coatings
  • Water-dispersible organosilanes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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