Electrodeposited micro-actuators

A simple tool for impedance-based sensing

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper is focused on the design of metal (Ni) electro-thermal micro-actuators, fabricated via a single electro-plating step. Analytical and finite-element solutions of the electro-thermal and thermo-elastic problems are presented to aid in the design of the devices. A separate section is devoted to the problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. Finally, a possible future use of these actuators in impedance-based biosensors is outlined. copyright The Electrochemical Society.

Original languageEnglish (US)
Title of host publicationECS Transactions
Pages339-350
Number of pages12
Volume3
Edition10
DOIs
StatePublished - 2006
EventChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: Oct 29 2006Nov 3 2006

Other

OtherChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting
CountryMexico
CityCancun
Period10/29/0611/3/06

Fingerprint

Actuators
Capacitance measurement
Plating
Biosensors
Metals
Hot Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Electrodeposited micro-actuators : A simple tool for impedance-based sensing. / Enikov, Eniko T.

ECS Transactions. Vol. 3 10. ed. 2006. p. 339-350.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Enikov, ET 2006, Electrodeposited micro-actuators: A simple tool for impedance-based sensing. in ECS Transactions. 10 edn, vol. 3, pp. 339-350, Chemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting, Cancun, Mexico, 10/29/06. https://doi.org/10.1149/1.2357274
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