This paper is focused on the design of metal (Ni) electro-thermal micro-actuators, fabricated via a single electro-plating step. Analytical and finite-element solutions of the electro-thermal and thermo-elastic problems are presented to aid in the design of the devices. A separate section is devoted to the problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. Finally, a possible future use of these actuators in impedance-based biosensors is outlined. copyright The Electrochemical Society.
|Original language||English (US)|
|Number of pages||12|
|State||Published - Dec 1 2006|
|Event||Chemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting - Cancun, Mexico|
Duration: Oct 29 2006 → Nov 3 2006
ASJC Scopus subject areas