Electrodeposited micro-actuators: A simple tool for impedance-based sensing

Research output: Contribution to journalConference article

Abstract

This paper is focused on the design of metal (Ni) electro-thermal micro-actuators, fabricated via a single electro-plating step. Analytical and finite-element solutions of the electro-thermal and thermo-elastic problems are presented to aid in the design of the devices. A separate section is devoted to the problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. Finally, a possible future use of these actuators in impedance-based biosensors is outlined. copyright The Electrochemical Society.

Original languageEnglish (US)
Pages (from-to)339-350
Number of pages12
JournalECS Transactions
Volume3
Issue number10
DOIs
StatePublished - Dec 1 2006
EventChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: Oct 29 2006Nov 3 2006

ASJC Scopus subject areas

  • Engineering(all)

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