Electrokinetic Characteristics of Nitride Wafers in Aqueous Solutions and Their Impact on Particulate Deposition

Der'E Jan, Srini Raghavan

Research output: Contribution to journalArticle

11 Scopus citations

Abstract

The electrokinetic characteristics of low pressure and plasma-enhanced chemical vapor deposited silicon nitride wafers subjected to different cleaning procedures were measured using a streaming potential technique. A streaming potential cell for handling 5 in. wafers was designed and fabricated to make these measurements. The isoelectric point (IEP) of silicon nitride was dependent on the cleaning method as well as the deposition technique. X-ray photoelectron spectroscopic measurement of Si/O and Si/N ratio of films was made to explain the difference in the measured IEP values. Polystyrene latex particle deposition from aqueous solutions onto silicon nitride wafers was investigated and correlated with the electrokinetic potential data.

Original languageEnglish (US)
Pages (from-to)2465-2469
Number of pages5
JournalJournal of the Electrochemical Society
Volume141
Issue number9
DOIs
StatePublished - Sep 1994

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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