Electrostatic lenses with very small spherical aberration

Research output: Contribution to journalArticle

7 Scopus citations

Abstract

A class of electrostatic lenses with extremely low spherical aberration is proposed. The axial potential distribution of these lenses has an asymmetric bell-shaped form with a lower potential on the image side. A lens with C so∞/fo=0.51 is presented as an example. The maximum required electrode voltage is only five times larger than the initial accelerating voltage. At 5 mrad acceptance half-angle, 51 mm focal length, and magnification M=-3.3 the radius of the spherical aberration disk is 6 nm.

Original languageEnglish (US)
Pages (from-to)767-769
Number of pages3
JournalApplied Physics Letters
Volume49
Issue number13
DOIs
StatePublished - Dec 1 1986

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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