Electrostatic spline lenses

Research output: Contribution to journalArticle

9 Scopus citations

Abstract

A systematic investigation of electrostatic lenses is proposed on the basis of the cubic spline model. The model is a convenient tool for varying the basic parameters of the potential distributions of different classes of electrostatic lenses. The actual electrode system is reconstructed from the distribution with the best figure of merit by a straightforward procedure. The simple spline class consisting of two intervals is investigated in detail. A superior quality six-electrode lens is proposed as an example.

Original languageEnglish (US)
Pages (from-to)273-278
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume5
Issue number2
DOIs
StatePublished - 1987

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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