Ellipsometry

Research output: Contribution to specialist publicationArticle

9 Scopus citations

Abstract

A report on the various goals of ellipsometry was presented. Ellipsometry determined the optical and structural constants of thin films and flat surfaces based on the measurements of the ellipse of polarization in reflected or transmitted light. The results of ellipsometric measurements were fed to a computer program that searches the space of unknown parameters.

Original languageEnglish (US)
Pages52-56
Number of pages5
Volume11
No4
Specialist publicationOptics and Photonics News
DOIs
StatePublished - Apr 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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