Engineering of porosity in amorphous materials. Plasma oxidation of hydrocarbon templates in polysilsesquioxanes

Douglas A. Loy, Richard J. Buss, Roger A. Assink, Kenneth J. Shea, Henry Oviatt

Research output: Contribution to journalConference article

10 Scopus citations


Arylene- and alkylene-bridged polysilsesquioxanes were prepared by sol-gel processing of bis(triethoxysilyl)-arylene monomers 1-4, and alkylene monomers 5-9. The arylene polysilsesquioxanes were porous materials with surface areas as high as 830 m2/g (BET). Treatment with an inductively coupled oxygen plasma resulted in the near quantitative removal of the arylene bridging groups and a coarsening of the pore structure. Solid state 29Si NMR was used to confirm the conversion of the sesquioxane silicons (T) to silica (Q). The alkylene-bridged polysilsesquioxanes were non-porous. Oxygen plasma treatment afforded silica gels with mesoporosity. The porosity in the silica gels appears to arise entirely from the oxidation of the alkylene spacers.

Original languageEnglish (US)
Pages (from-to)825-829
Number of pages5
JournalMaterials Research Society Symposium - Proceedings
StatePublished - Dec 1 1994
Externally publishedYes
EventProceedings of the 1994 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 4 1994Apr 8 1994


ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this