Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma

J. C. Barbour, Barrett G Potter, D. M. Follstaedt, J. A. Knapp, M. B. Sinclair

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γ-Al2O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsD.E. Alexander, N.W. Cheung, B. Park, W. Skorupa
PublisherMaterials Research Society
Pages465-470
Number of pages6
Volume438
StatePublished - 1996
Externally publishedYes
EventProceedings of the 1996 MRS Fall Meeting - Boston, MA, USA
Duration: Dec 2 1996Dec 5 1996

Other

OtherProceedings of the 1996 MRS Fall Meeting
CityBoston, MA, USA
Period12/2/9612/5/96

Fingerprint

Oxides
Photoluminescence
Ions
Crystalline materials
Plasmas
Electron cyclotron resonance
Oxide films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Barbour, J. C., Potter, B. G., Follstaedt, D. M., Knapp, J. A., & Sinclair, M. B. (1996). Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma. In D. E. Alexander, N. W. Cheung, B. Park, & W. Skorupa (Eds.), Materials Research Society Symposium - Proceedings (Vol. 438, pp. 465-470). Materials Research Society.

Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma. / Barbour, J. C.; Potter, Barrett G; Follstaedt, D. M.; Knapp, J. A.; Sinclair, M. B.

Materials Research Society Symposium - Proceedings. ed. / D.E. Alexander; N.W. Cheung; B. Park; W. Skorupa. Vol. 438 Materials Research Society, 1996. p. 465-470.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Barbour, JC, Potter, BG, Follstaedt, DM, Knapp, JA & Sinclair, MB 1996, Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma. in DE Alexander, NW Cheung, B Park & W Skorupa (eds), Materials Research Society Symposium - Proceedings. vol. 438, Materials Research Society, pp. 465-470, Proceedings of the 1996 MRS Fall Meeting, Boston, MA, USA, 12/2/96.
Barbour JC, Potter BG, Follstaedt DM, Knapp JA, Sinclair MB. Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma. In Alexander DE, Cheung NW, Park B, Skorupa W, editors, Materials Research Society Symposium - Proceedings. Vol. 438. Materials Research Society. 1996. p. 465-470
Barbour, J. C. ; Potter, Barrett G ; Follstaedt, D. M. ; Knapp, J. A. ; Sinclair, M. B. / Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma. Materials Research Society Symposium - Proceedings. editor / D.E. Alexander ; N.W. Cheung ; B. Park ; W. Skorupa. Vol. 438 Materials Research Society, 1996. pp. 465-470
@inproceedings{f8fc64efe4ec4757864c94f6c398d146,
title = "Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma",
abstract = "The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γ-Al2O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.",
author = "Barbour, {J. C.} and Potter, {Barrett G} and Follstaedt, {D. M.} and Knapp, {J. A.} and Sinclair, {M. B.}",
year = "1996",
language = "English (US)",
volume = "438",
pages = "465--470",
editor = "D.E. Alexander and N.W. Cheung and B. Park and W. Skorupa",
booktitle = "Materials Research Society Symposium - Proceedings",
publisher = "Materials Research Society",

}

TY - GEN

T1 - Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma

AU - Barbour, J. C.

AU - Potter, Barrett G

AU - Follstaedt, D. M.

AU - Knapp, J. A.

AU - Sinclair, M. B.

PY - 1996

Y1 - 1996

N2 - The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γ-Al2O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.

AB - The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γ-Al2O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.

UR - http://www.scopus.com/inward/record.url?scp=0030364063&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030364063&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0030364063

VL - 438

SP - 465

EP - 470

BT - Materials Research Society Symposium - Proceedings

A2 - Alexander, D.E.

A2 - Cheung, N.W.

A2 - Park, B.

A2 - Skorupa, W.

PB - Materials Research Society

ER -