Er-doped fluoride glass films by MOCVD for waveguide devices

Chia Yen Li, Vladimir Fuflyigin, Jing Zhao, Xuesheng Chen, Seppo Honkanen, Nasser N Peyghambarian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on the growth of erbium doped ZrF4-LaF3- BaF2 glass films by metalorganic chemical vapor deposition (MOCVD) for the construction of planar waveguide devices. Our process provides the growth of high quality, uniform in thickness, and continuous films on a wide variety of common substrates. A protective layer of MgF2 was deposited in-situ onto the Er-doped glass films under the same CVD deposition conditions. The luminescence of Er around 1.55 micrometers was observed in films on all the substrates used. The emission line shapes are the same as those observed from Er-doped fluorozirconate glass. MOCVD proved to be a feasible technology to grow rare-earth doped fluoride films for planar waveguide devices.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages68-73
Number of pages6
Volume2996
DOIs
StatePublished - 1997
EventRare-Earth-Doped Devices - San Jose, CA, United States
Duration: Feb 10 1997Feb 10 1997

Other

OtherRare-Earth-Doped Devices
CountryUnited States
CitySan Jose, CA
Period2/10/972/10/97

Fingerprint

Chemical Vapor Deposition
Metallorganic chemical vapor deposition
Fluorides
metalorganic chemical vapor deposition
Waveguide
fluorides
Waveguides
waveguides
Glass
glass
Planar Waveguides
Planar waveguides
Substrate
Erbium
Rare Earths
Luminescence
Substrates
erbium
Rare earths
line shape

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Li, C. Y., Fuflyigin, V., Zhao, J., Chen, X., Honkanen, S., & Peyghambarian, N. N. (1997). Er-doped fluoride glass films by MOCVD for waveguide devices. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2996, pp. 68-73) https://doi.org/10.1117/12.271145

Er-doped fluoride glass films by MOCVD for waveguide devices. / Li, Chia Yen; Fuflyigin, Vladimir; Zhao, Jing; Chen, Xuesheng; Honkanen, Seppo; Peyghambarian, Nasser N.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2996 1997. p. 68-73.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Li, CY, Fuflyigin, V, Zhao, J, Chen, X, Honkanen, S & Peyghambarian, NN 1997, Er-doped fluoride glass films by MOCVD for waveguide devices. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 2996, pp. 68-73, Rare-Earth-Doped Devices, San Jose, CA, United States, 2/10/97. https://doi.org/10.1117/12.271145
Li CY, Fuflyigin V, Zhao J, Chen X, Honkanen S, Peyghambarian NN. Er-doped fluoride glass films by MOCVD for waveguide devices. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2996. 1997. p. 68-73 https://doi.org/10.1117/12.271145
Li, Chia Yen ; Fuflyigin, Vladimir ; Zhao, Jing ; Chen, Xuesheng ; Honkanen, Seppo ; Peyghambarian, Nasser N. / Er-doped fluoride glass films by MOCVD for waveguide devices. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2996 1997. pp. 68-73
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