Error analysis for CGH optical testing

Yu Chun Chang, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

58 Citations (Scopus)

Abstract

Computer generated holograms are widely used in optical testing and metrology. The primary role of the CGHs is to generate reference wavefront with any desired shape. Optical or electron-beam writers are commonly used for CGH fabrication. Limitations from the hologram fabrication processes cause errors in the reproduced wavefront. Errors in duty-cycle and etching depth have direct impact on both the amplitude and phase functions of the reproduced wavefront. A study using scalar diffraction model to simulate CGH fabrication errors and their effects on wavefront amplitude and phase functions are presented. Experimental analysis confirms the theoretical model. An example is given at the end to demonstrate one of the many applications of the wavefront sensitivity functions in CGH error budgeting for optical metrology.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages358-366
Number of pages9
Volume3782
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1999 'Optical Manufacturing and Testing III' - Denver, CO, USA
Duration: Jul 20 1999Jul 23 1999

Other

OtherProceedings of the 1999 'Optical Manufacturing and Testing III'
CityDenver, CO, USA
Period7/20/997/23/99

Fingerprint

Optical testing
error analysis
Wavefronts
Error analysis
metrology
fabrication
Holograms
budgeting
Fabrication
Budget control
etching
electron beams
scalars
Electron beams
Etching
Diffraction
cycles
causes
sensitivity
diffraction

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Chang, Y. C., & Burge, J. H. (1999). Error analysis for CGH optical testing. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3782, pp. 358-366). Society of Photo-Optical Instrumentation Engineers.

Error analysis for CGH optical testing. / Chang, Yu Chun; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782 Society of Photo-Optical Instrumentation Engineers, 1999. p. 358-366.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chang, YC & Burge, JH 1999, Error analysis for CGH optical testing. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3782, Society of Photo-Optical Instrumentation Engineers, pp. 358-366, Proceedings of the 1999 'Optical Manufacturing and Testing III', Denver, CO, USA, 7/20/99.
Chang YC, Burge JH. Error analysis for CGH optical testing. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782. Society of Photo-Optical Instrumentation Engineers. 1999. p. 358-366
Chang, Yu Chun ; Burge, James H. / Error analysis for CGH optical testing. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3782 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 358-366
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