EUVL projection-camera alignment methods

Michael R. Descour; Mark R. Willer; Dana S. Clarke; Jose M. Sasian

doi:10.1117/12.351141

EUVL projection-camera alignment methods

Michael R. Descour, Mark R. Willer, Dana S. Clarke, Jose M. Sasian

Optical Sciences, College of

Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specifications such as chief-ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can `fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an EUVL projection camera.

Original language	English (US)
Pages (from-to)	663-668
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3676
Issue number	II
DOIs	https://doi.org/10.1117/12.351141
State	Published - Jan 1 1999
Event	Proceedings of the 1999 Emerging Lithographic Technologies III - Santa Clara, CA, USA Duration: Mar 15 1999 → Mar 17 1999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "EUVL projection-camera alignment methods",

abstract = "Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specifications such as chief-ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can `fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an EUVL projection camera.",

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AU - Descour, Michael R.

AU - Willer, Mark R.

AU - Clarke, Dana S.

AU - Sasian, Jose M.

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AB - Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specifications such as chief-ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can `fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an EUVL projection camera.

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