EUVL projection-camera alignment methods

Michael R. Descour, Mark R. Willer, Dana S. Clarke, Jose M Sasian

Research output: Chapter in Book/Report/Conference proceedingChapter

7 Citations (Scopus)

Abstract

Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specifications such as chief-ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can `fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an EUVL projection camera.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages663-668
Number of pages6
Volume3676
EditionII
StatePublished - 1999
EventProceedings of the 1999 Emerging Lithographic Technologies III - Santa Clara, CA, USA
Duration: Mar 15 1999Mar 17 1999

Other

OtherProceedings of the 1999 Emerging Lithographic Technologies III
CitySanta Clara, CA, USA
Period3/15/993/17/99

Fingerprint

Extreme ultraviolet lithography
projection
Cameras
cameras
alignment
misalignment
metrology
rays
pupils
strokes
field of view
specifications
actuators
Wavefronts
mirrors
Mirrors
sensitivity
rings
Actuators
Specifications

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Descour, M. R., Willer, M. R., Clarke, D. S., & Sasian, J. M. (1999). EUVL projection-camera alignment methods. In Proceedings of SPIE - The International Society for Optical Engineering (II ed., Vol. 3676, pp. 663-668). Society of Photo-Optical Instrumentation Engineers.

EUVL projection-camera alignment methods. / Descour, Michael R.; Willer, Mark R.; Clarke, Dana S.; Sasian, Jose M.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3676 II. ed. Society of Photo-Optical Instrumentation Engineers, 1999. p. 663-668.

Research output: Chapter in Book/Report/Conference proceedingChapter

Descour, MR, Willer, MR, Clarke, DS & Sasian, JM 1999, EUVL projection-camera alignment methods. in Proceedings of SPIE - The International Society for Optical Engineering. II edn, vol. 3676, Society of Photo-Optical Instrumentation Engineers, pp. 663-668, Proceedings of the 1999 Emerging Lithographic Technologies III, Santa Clara, CA, USA, 3/15/99.
Descour MR, Willer MR, Clarke DS, Sasian JM. EUVL projection-camera alignment methods. In Proceedings of SPIE - The International Society for Optical Engineering. II ed. Vol. 3676. Society of Photo-Optical Instrumentation Engineers. 1999. p. 663-668
Descour, Michael R. ; Willer, Mark R. ; Clarke, Dana S. ; Sasian, Jose M. / EUVL projection-camera alignment methods. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3676 II. ed. Society of Photo-Optical Instrumentation Engineers, 1999. pp. 663-668
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