Abstract
Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specifications such as chief-ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can `fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an EUVL projection camera.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Publisher | Society of Photo-Optical Instrumentation Engineers |
| Pages | 663-668 |
| Number of pages | 6 |
| Volume | 3676 |
| Edition | II |
| State | Published - 1999 |
| Event | Proceedings of the 1999 Emerging Lithographic Technologies III - Santa Clara, CA, USA Duration: Mar 15 1999 → Mar 17 1999 |
Other
| Other | Proceedings of the 1999 Emerging Lithographic Technologies III |
|---|---|
| City | Santa Clara, CA, USA |
| Period | 3/15/99 → 3/17/99 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
EUVL projection-camera alignment methods. / Descour, Michael R.; Willer, Mark R.; Clarke, Dana S.; Sasian, Jose M.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3676 II. ed. Society of Photo-Optical Instrumentation Engineers, 1999. p. 663-668.Research output: Chapter in Book/Report/Conference proceeding › Chapter
}
TY - CHAP
T1 - EUVL projection-camera alignment methods
AU - Descour, Michael R.
AU - Willer, Mark R.
AU - Clarke, Dana S.
AU - Sasian, Jose M
PY - 1999
Y1 - 1999
N2 - Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specifications such as chief-ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can `fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an EUVL projection camera.
AB - Comparison of misalignment modes associated with metrology data and projection-camera performance can be used to increase the sensitivity of metrology measurements to specific camera-performance specifications such as chief-ray distortion. Selection of measurable misalignment modes in the case of metrology and interesting misalignment modes in the case of camera performance is based on a determination of whether a mode can `fit' into a projection camera given actuator-stroke and mirror tilt bounds. Measurement and interest subspaces are next compared using distance between subspaces. As an example of this type of analysis, we find that exit-pupil wavefront measurements can be made more sensitive to chief-ray distortion if these measurements are collected at field positions outside the ring field of view of an EUVL projection camera.
UR - http://www.scopus.com/inward/record.url?scp=0032672986&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0032672986&partnerID=8YFLogxK
M3 - Chapter
VL - 3676
SP - 663
EP - 668
BT - Proceedings of SPIE - The International Society for Optical Engineering
PB - Society of Photo-Optical Instrumentation Engineers
ER -