Evaluating the trace-moisture measurement capability of coulometric hygrometry

Ce Ma, Farhang Shadman, Jacques Mettes, Lance Silverman

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Study data show that an advanced coulometric hygrometer design incorporating a counterflow sensor cell, a moisture addition feature, and signal integration extends the range of the measurements technique to single-digit ppd levels. Characterization of the hygrometer in the integration mode in parallel with an atmospheric pressure ionization mass spectrometer (APIMS) indicated that its accuracy is ±4 ppb, its detection limit is 1 ppd at a 95% confidence limit, and its response time to a 5-ppb moisture intrusion is 50% in 15 minutes.

Original languageEnglish (US)
Pages (from-to)43-49
Number of pages7
JournalMICRO
Volume13
Issue number4
StatePublished - Apr 1995

Fingerprint

Hygrometers
hygrometers
moisture
Moisture
confidence limits
counterflow
digits
Mass spectrometers
intrusion
mass spectrometers
Atmospheric pressure
Ionization
atmospheric pressure
ionization
sensors
Sensors
cells

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Evaluating the trace-moisture measurement capability of coulometric hygrometry. / Ma, Ce; Shadman, Farhang; Mettes, Jacques; Silverman, Lance.

In: MICRO, Vol. 13, No. 4, 04.1995, p. 43-49.

Research output: Contribution to journalArticle

Ma, C, Shadman, F, Mettes, J & Silverman, L 1995, 'Evaluating the trace-moisture measurement capability of coulometric hygrometry', MICRO, vol. 13, no. 4, pp. 43-49.
Ma, Ce ; Shadman, Farhang ; Mettes, Jacques ; Silverman, Lance. / Evaluating the trace-moisture measurement capability of coulometric hygrometry. In: MICRO. 1995 ; Vol. 13, No. 4. pp. 43-49.
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