Evaluating the trace-moisture measurement capability of coulometric hygrometry

Ce Ma, Farhang Shadman, Jacques Mettes, Lance Silverman

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

Study data show that an advanced coulometric hygrometer design incorporating a counterflow sensor cell, a moisture addition feature, and signal integration extends the range of the measurements technique to single-digit ppd levels. Characterization of the hygrometer in the integration mode in parallel with an atmospheric pressure ionization mass spectrometer (APIMS) indicated that its accuracy is ±4 ppb, its detection limit is 1 ppd at a 95% confidence limit, and its response time to a 5-ppb moisture intrusion is 50% in 15 minutes.

Original languageEnglish (US)
Pages (from-to)43-49
Number of pages7
JournalMICRO
Volume13
Issue number4
StatePublished - Apr 1 1995

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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