Evaluation of a backside-illuminated ISIS

H. D. Nguyen, C. Vo-Le, V. T.S. Dao, K. Takehara, T. G. Etoh, Y. Kondo, H. Maruno, H. Tominaga, H. Soya, H. Van Kuijk, J. Bosiers, W. Klaassens, G. Ingram, S. Singh, M. Lesser

Research output: Contribution to journalConference article

Abstract

This paper presents preliminary evaluation results of a test sensor of the backside-illuminated ISIS, an ultra-high sensitivity and ultra-high speed CCD image sensor. To achieve ultra-high sensitivity, the CCD image sensor employs the following three technologies: backside illumination, cooling and Charge Carrier Multiplication (CCM). The test sensor has been designed, fabricated and evaluated. At room temperature without cooling, the video camera has about ten-time higher sensitivity than the previous one, which was supported by a conventional front side illumination technology. Furthermore, the video camera can detect images at very low signal level, less than 5 e-, by using CCM at -40 degree C.

Original languageEnglish (US)
Article number712607
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume7126
DOIs
StatePublished - May 29 2009
Event28th International Congress on High-Speed Imaging and Photonics - Canberra, Australia
Duration: Nov 9 2008Nov 14 2008

Keywords

  • Backside illumination
  • CCM
  • High-sensitivity
  • High-speed
  • ISIS
  • Video camera

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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    Nguyen, H. D., Vo-Le, C., Dao, V. T. S., Takehara, K., Etoh, T. G., Kondo, Y., Maruno, H., Tominaga, H., Soya, H., Van Kuijk, H., Bosiers, J., Klaassens, W., Ingram, G., Singh, S., & Lesser, M. (2009). Evaluation of a backside-illuminated ISIS. Proceedings of SPIE - The International Society for Optical Engineering, 7126, [712607]. https://doi.org/10.1117/12.821985