Evaluation of inhibitors for ECMP of copper using Electrochemical Quartz Crystal Microbalance (EQCM) technique

Ashok Muthukumaran, Viral Lowalekar, Srini Raghavan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

Chemical formulations for the electrochemical mechanical planarization (ECMP) of copper must contain constituents that are stable at anodic potentials. A key component of the formulation is a corrosion inhibitor, which is required to protect low lying areas while higher areas are selectively removed. Organic compounds, which adsorb on copper at low overpotentials and form a film by oxidation at higher overpotentials, may be particularly useful for ECMP. The objective of this work is to evaluate the effect of two inhibitors on copper dissolution in oxalic acid based systems using an electrochemical quartz crystal microbalance (EQCM) technique. By recording current as well as mass changes during the application of potential to electrodeposited copper films, the extent and mechanism of inhibition of sulfhydryl-based acid (SB A) inhibitor has been explored.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
Pages231-236
Number of pages6
Volume914
StatePublished - 2006
Event2006 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 18 2006Apr 21 2006

Other

Other2006 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/18/064/21/06

Fingerprint

Quartz crystal microbalances
Copper
Oxalic Acid
Oxalic acid
Corrosion inhibitors
Organic compounds
Dissolution
Oxidation
Acids

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Muthukumaran, A., Lowalekar, V., & Raghavan, S. (2006). Evaluation of inhibitors for ECMP of copper using Electrochemical Quartz Crystal Microbalance (EQCM) technique. In Materials Research Society Symposium Proceedings (Vol. 914, pp. 231-236)

Evaluation of inhibitors for ECMP of copper using Electrochemical Quartz Crystal Microbalance (EQCM) technique. / Muthukumaran, Ashok; Lowalekar, Viral; Raghavan, Srini.

Materials Research Society Symposium Proceedings. Vol. 914 2006. p. 231-236.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Muthukumaran, A, Lowalekar, V & Raghavan, S 2006, Evaluation of inhibitors for ECMP of copper using Electrochemical Quartz Crystal Microbalance (EQCM) technique. in Materials Research Society Symposium Proceedings. vol. 914, pp. 231-236, 2006 MRS Spring Meeting, San Francisco, CA, United States, 4/18/06.
Muthukumaran A, Lowalekar V, Raghavan S. Evaluation of inhibitors for ECMP of copper using Electrochemical Quartz Crystal Microbalance (EQCM) technique. In Materials Research Society Symposium Proceedings. Vol. 914. 2006. p. 231-236
Muthukumaran, Ashok ; Lowalekar, Viral ; Raghavan, Srini. / Evaluation of inhibitors for ECMP of copper using Electrochemical Quartz Crystal Microbalance (EQCM) technique. Materials Research Society Symposium Proceedings. Vol. 914 2006. pp. 231-236
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