Evanescent imaging with induced polarization by using a solid immersion lens

Tao Chen, Tom D. Milster, Seung Hune Yang, Delbert Hansen

Research output: Contribution to journalArticle

10 Scopus citations

Abstract

Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ±2 nm is demonstrated with a known sample.

Original languageEnglish (US)
Pages (from-to)124-126
Number of pages3
JournalOptics letters
Volume32
Issue number2
DOIs
StatePublished - Jan 15 2007

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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