Experimental investigation of photomask with near-field polarization imaging

Tao Chen, Thomas D Milster, Seung Hune Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution for both native and induced polarization (cross polarized) images. A new technique is used to obtain height information from the near-field induced polarization image. An AltPSM mask sample is studied with this imaging technique, and compared to imaging with an AFM and a PSI interferometer. Topological data from the near-field induced polarization image are within a few nanometer of the AFM result, without contacting surface. In addition, features due to undercutting the Cr are observable in the induced polarization image.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6349 I
DOIs
StatePublished - 2006
Event26th Annual BACUS Symposium on Photomask Technology 2006 - Monterey, CA, United States
Duration: Sep 19 2006Sep 22 2006

Other

Other26th Annual BACUS Symposium on Photomask Technology 2006
CountryUnited States
CityMonterey, CA
Period9/19/069/22/06

Fingerprint

Photomasks
photomasks
near fields
Polarization
Imaging techniques
polarization
atomic force microscopy
cross polarization
imaging techniques
submerging
masks
interferometers
Interferometers
lenses
Masks
Lenses

Keywords

  • AltPSM
  • High resolution
  • Near-field
  • Polarization
  • Solid immersion lens (SIL)
  • Topographical image

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Chen, T., Milster, T. D., & Yang, S. H. (2006). Experimental investigation of photomask with near-field polarization imaging. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6349 I). [634953] https://doi.org/10.1117/12.686420

Experimental investigation of photomask with near-field polarization imaging. / Chen, Tao; Milster, Thomas D; Yang, Seung Hune.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6349 I 2006. 634953.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, T, Milster, TD & Yang, SH 2006, Experimental investigation of photomask with near-field polarization imaging. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 6349 I, 634953, 26th Annual BACUS Symposium on Photomask Technology 2006, Monterey, CA, United States, 9/19/06. https://doi.org/10.1117/12.686420
Chen T, Milster TD, Yang SH. Experimental investigation of photomask with near-field polarization imaging. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6349 I. 2006. 634953 https://doi.org/10.1117/12.686420
Chen, Tao ; Milster, Thomas D ; Yang, Seung Hune. / Experimental investigation of photomask with near-field polarization imaging. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6349 I 2006.
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