Fabrication and characterization of a microsystem for a micro-scale heat transfer study

Linan Jiang, Yuelin Wang, Man Wong, Yitshak Zohar

Research output: Contribution to journalArticle

32 Scopus citations

Abstract

A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of the heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40 μm×1.4 μm×4000 μm. Polysilicon thermistors, 4 μm×4 μm×0.4 μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated and the micro-system was characterized. The integrated micro-system performance was theoretically analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.

Original languageEnglish (US)
Pages (from-to)422-428
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume9
Issue number4
DOIs
StatePublished - Dec 1 1999
Externally publishedYes

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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