Fabrication and characterization of niobium diffusion-cooled hot-electron bolometers on silicon nitride membranes

Aaron M. Datesman, Jonathan C. Schultz, Arthur W. Lichtenberger, Dathon Golish, Christopher K. Walker, Jacob Kooi

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

We have successfully fabricated niobium diffusion-cooled hot-electron bolometer (HEB) mixers on membranes of silicon nitride less than one micron thick. This advance has allowed us to construct a 1 × 5 HEB receiver array intended for operation at 1.45 THz. This article provides an overview of the integration of the HEB array chip with silicon micromachined backshorts and feedhorns, discusses materials issues surrounding the device fabrication, reports resistance and I-V measurements, and compares HEBs fabricated on silicon nitride to similar devices on quartz substrates.

Original languageEnglish (US)
Pages (from-to)928-931
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Volume15
Issue number2 PART I
DOIs
StatePublished - Jun 1 2005

Keywords

  • Focused-ion beam
  • HEB
  • Membrane
  • Mixer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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