Fabrication and characterization of sub-100 μm diameter gallium phosphide solid immersion lens arrays

Matthew Lang, Thomas D Milster, Takahisa Minamitani, Gregg Borek, David Brown

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

Fabrication and testing of a sub-100 μm gallium phosphide solid immersion lens is described with suitable sphericity (<160nm deviation) to a marginal ray angle of 42° for NA up to 2.2 inside the material.

Original languageEnglish (US)
Pages (from-to)3385-3387
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume44
Issue number5 B
DOIs
Publication statusPublished - May 2005

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Keywords

  • Gallium phosphide
  • Lithography
  • Phase-shifting interferometry
  • Solid immersion lens

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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