Fabrication and structure of Mo/Ta superlattices

Wayne R. Bennett, Charles M. Falco

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


Mo/Ta superlattices with superlattice wavelengths in the range 20-180 Å were made by alternately sputtering these components. We present the results of a variety of x-ray diffraction studies used to structurally characterize these samples.

Original languageEnglish (US)
Pages (from-to)2176-2178
Number of pages3
JournalJournal of Applied Physics
Issue number6
StatePublished - Dec 1 1988

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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