Fabrication and structure of Mo/Ta superlattices

Wayne R. Bennett, Charles M. Falco

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

Mo/Ta superlattices with superlattice wavelengths in the range 20-180 Å were made by alternately sputtering these components. We present the results of a variety of x-ray diffraction studies used to structurally characterize these samples.

Original languageEnglish (US)
Pages (from-to)2176-2178
Number of pages3
JournalJournal of Applied Physics
Volume63
Issue number6
DOIs
StatePublished - Dec 1 1988

    Fingerprint

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this