Fabrication and structure of Mo/Ta superlattices

Wayne R. Bennett, Charles M Falco

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Mo/Ta superlattices with superlattice wavelengths in the range 20-180 Å were made by alternately sputtering these components. We present the results of a variety of x-ray diffraction studies used to structurally characterize these samples.

Original languageEnglish (US)
Pages (from-to)2176-2178
Number of pages3
JournalJournal of Applied Physics
Volume63
Issue number6
DOIs
StatePublished - 1988

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superlattices
x ray diffraction
sputtering
fabrication
wavelengths

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Fabrication and structure of Mo/Ta superlattices. / Bennett, Wayne R.; Falco, Charles M.

In: Journal of Applied Physics, Vol. 63, No. 6, 1988, p. 2176-2178.

Research output: Contribution to journalArticle

Bennett, Wayne R. ; Falco, Charles M. / Fabrication and structure of Mo/Ta superlattices. In: Journal of Applied Physics. 1988 ; Vol. 63, No. 6. pp. 2176-2178.
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