Fabrication and testing of a large area, high density, parylene MEMS μECoG array

P. Ledochowitsch, R. J. Félus, R. R. Gibboni, A. Miyakawa, S. Bao, M. M. Maharbiz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Scopus citations

Abstract

We report the design, microfabrication and testing of a flexible 256-electrode array for micro-electrocorticography (μECoG) with an electrode pitch of 500 μm. Our μECoG grid is a flexible five-layer parylene MEMS device (two layers of platinum insulated by three layers of parylene) featuring plasma-etched vias and a monolithically integrated parylene cable which is compression-bonded to a fan-out board using anisotropic conductive film (ACF) technology. We have characterized the device by electrochemical impedance spectroscopy in artificial cerebrospinal fluid (aCSF) and recorded acoustic evoked potentials in vivo from the rat primary auditory cortex.

Original languageEnglish (US)
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages1031-1034
Number of pages4
DOIs
StatePublished - 2011
Externally publishedYes
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: Jan 23 2011Jan 27 2011

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/TerritoryMexico
CityCancun
Period1/23/111/27/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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