Fabrication and testing of large flats

Julius Yellowhair, Peng Su, Matt Novak, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

Flat mirrors of around 1 meter are efficiently manufactured with large piano polishers and measured with Fizeau interferometry. We have developed technologies and hardware that allow fabrication and testing of flat mirrors that are much larger. The grinding and polishing of the large surfaces uses conventional laps driven under computer control for accurate and systematic control of the surface figure. The measurements are provided by a combination of a scanning pentaprism test, capable of measuring power and low order irregularity over diameters up to 8 meters, and subaperture Fizeau interferometry. We have developed a vibration insensitive Fizeau interferometer with 1 meter aperture and software to optimally combine the data from the subaperture tests. These methods were proven on a 1.6 m flat mirror that was finished to 6 nm rms irregularity and 11 nm rms power.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6671
DOIs
StatePublished - 2007
EventOptical Manufacturing and Testing VII - San Diego, CA, United States
Duration: Aug 28 2007Aug 29 2007

Other

OtherOptical Manufacturing and Testing VII
CountryUnited States
CitySan Diego, CA
Period8/28/078/29/07

Fingerprint

Interferometry
mirrors
irregularities
Fabrication
fabrication
Computer control
interferometry
Testing
Polishing
Interferometers
Mirrors
grinding
Scanning
Hardware
polishing
hardware
interferometers
apertures
computer programs
vibration

Keywords

  • Large flat fabrication
  • Metrology
  • Optical manufacturing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Yellowhair, J., Su, P., Novak, M., & Burge, J. H. (2007). Fabrication and testing of large flats. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6671). [667107] https://doi.org/10.1117/12.736775

Fabrication and testing of large flats. / Yellowhair, Julius; Su, Peng; Novak, Matt; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6671 2007. 667107.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yellowhair, J, Su, P, Novak, M & Burge, JH 2007, Fabrication and testing of large flats. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 6671, 667107, Optical Manufacturing and Testing VII, San Diego, CA, United States, 8/28/07. https://doi.org/10.1117/12.736775
Yellowhair J, Su P, Novak M, Burge JH. Fabrication and testing of large flats. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6671. 2007. 667107 https://doi.org/10.1117/12.736775
Yellowhair, Julius ; Su, Peng ; Novak, Matt ; Burge, James H. / Fabrication and testing of large flats. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6671 2007.
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