Fabrication error analysis and experimental demonstration for computer-generated holograms

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Abstract

Aspheric optical surfaces are often tested using computer-generated holograms (CGHs). For precise measurement, the wavefront errors caused by the CGH must be known and characterized. A parametric model relating the wavefront errors to the CGH fabrication errors is introduced. Methods are discussed for measuring the fabrication errors in the CGH substrate, duty cycle, etching depth, and effect of surface roughness. An example analysis of the wavefront errors from fabrication nonuniformities for a phase CGH is given. The calibration of these effects for a CGH null corrector is demonstrated to cause measurement error less than 1 nm.

Original languageEnglish (US)
Pages (from-to)657-663
Number of pages7
JournalApplied Optics
Volume46
Issue number5
DOIs
Publication statusPublished - Feb 10 2007

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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