Experimentally realizable 3D arrays of Josephson junctions have been a goal of researchers since 2D Josephson junctions (JJ) arrays were first introduced. In the past, it has proven to be technically impossible to manufacture 3D proximity-coupled arrays. Recent advancements in etching technology have now made fabrication more feasible. In this paper, we present details of our fabrication process.
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Electrical and Electronic Engineering