Fabrication of 3d proximity coupled josephson junction arrays

S. T. Herbert, L. B. Gomez, D. B. Mast, R. S. Newrock, C. Wilks, C. M. Falco

Research output: Contribution to journalArticlepeer-review


Experimentally realizable 3D arrays of Josephson junctions have been a goal of researchers since 2D Josephson junctions (JJ) arrays were first introduced. In the past, it has proven to be technically impossible to manufacture 3D proximity-coupled arrays. Recent advancements in etching technology have now made fabrication more feasible. In this paper, we present details of our fabrication process.

Original languageEnglish (US)
Pages (from-to)53-57
Number of pages5
JournalSuperlattices and Microstructures
Issue number1
StatePublished - Jan 1 1995

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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