Fabrication of circular gratings by FIB damage on GaAs

M. Fallahi, I. M. Templeton, R. Normandin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The authors demonstrate a simple technique for the fabrication of circular gratings using direct focused ion beams and selective etching. This technique allows one to fabricate high quality circular gratings and also to control the tooth height and pitch.

Original languageEnglish (US)
Title of host publicationInstitute of Physics Conference Series
PublisherPubl by IOP Publishing Ltd
Pages505-509
Number of pages5
ISBN (Print)0854984100
StatePublished - 1991
EventProceedings of the 18th International Symposium on Gallium Arsenide and Related Compounds - Seattle, WA, USA
Duration: Sep 9 1991Sep 12 1991

Publication series

NameInstitute of Physics Conference Series
Volume120
ISSN (Print)0951-3248

Other

OtherProceedings of the 18th International Symposium on Gallium Arsenide and Related Compounds
CitySeattle, WA, USA
Period9/9/919/12/91

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Fabrication of circular gratings by FIB damage on GaAs'. Together they form a unique fingerprint.

  • Cite this

    Fallahi, M., Templeton, I. M., & Normandin, R. (1991). Fabrication of circular gratings by FIB damage on GaAs. In Institute of Physics Conference Series (pp. 505-509). (Institute of Physics Conference Series; Vol. 120). Publ by IOP Publishing Ltd.