Fabrication of circular gratings by FIB damage on GaAs

Mahmoud Fallahi, I. M. Templeton, R. Normandin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The authors demonstrate a simple technique for the fabrication of circular gratings using direct focused ion beams and selective etching. This technique allows one to fabricate high quality circular gratings and also to control the tooth height and pitch.

Original languageEnglish (US)
Title of host publicationInstitute of Physics Conference Series
PublisherPubl by IOP Publishing Ltd
Pages505-509
Number of pages5
Volume120
ISBN (Print)0854984100
StatePublished - 1991
Externally publishedYes
EventProceedings of the 18th International Symposium on Gallium Arsenide and Related Compounds - Seattle, WA, USA
Duration: Sep 9 1991Sep 12 1991

Other

OtherProceedings of the 18th International Symposium on Gallium Arsenide and Related Compounds
CitySeattle, WA, USA
Period9/9/919/12/91

Fingerprint

gratings
damage
fabrication
teeth
ion beams
etching

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Fallahi, M., Templeton, I. M., & Normandin, R. (1991). Fabrication of circular gratings by FIB damage on GaAs. In Institute of Physics Conference Series (Vol. 120, pp. 505-509). Publ by IOP Publishing Ltd.

Fabrication of circular gratings by FIB damage on GaAs. / Fallahi, Mahmoud; Templeton, I. M.; Normandin, R.

Institute of Physics Conference Series. Vol. 120 Publ by IOP Publishing Ltd, 1991. p. 505-509.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fallahi, M, Templeton, IM & Normandin, R 1991, Fabrication of circular gratings by FIB damage on GaAs. in Institute of Physics Conference Series. vol. 120, Publ by IOP Publishing Ltd, pp. 505-509, Proceedings of the 18th International Symposium on Gallium Arsenide and Related Compounds, Seattle, WA, USA, 9/9/91.
Fallahi M, Templeton IM, Normandin R. Fabrication of circular gratings by FIB damage on GaAs. In Institute of Physics Conference Series. Vol. 120. Publ by IOP Publishing Ltd. 1991. p. 505-509
Fallahi, Mahmoud ; Templeton, I. M. ; Normandin, R. / Fabrication of circular gratings by FIB damage on GaAs. Institute of Physics Conference Series. Vol. 120 Publ by IOP Publishing Ltd, 1991. pp. 505-509
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