Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada, Gregory A. Cohoon, Khanh Q Kieu, Masud Mansuripur, Robert A Norwood

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 106. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.

Original languageEnglish (US)
Article number6412717
Pages (from-to)430-433
Number of pages4
JournalIEEE Photonics Technology Letters
Volume25
Issue number5
DOIs
StatePublished - 2013

Fingerprint

laser machining
Micromachining
Ultrashort pulses
Q factors
Resonators
resonators
Fabrication
fabrication
process heat
Whispering gallery modes
whispering gallery modes
Laser ablation
laser ablation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

Fabrication of high-Q microresonators using femtosecond laser micromachining. / Tada, Kazunari; Cohoon, Gregory A.; Kieu, Khanh Q; Mansuripur, Masud; Norwood, Robert A.

In: IEEE Photonics Technology Letters, Vol. 25, No. 5, 6412717, 2013, p. 430-433.

Research output: Contribution to journalArticle

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