Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada, Gregory Cohoon, Khanh Kieu, Masud Mansuripur, Robert A. Norwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report a novel technique to fabricate microdisk resonators using femtosecond laser micromachining. The resonators had suppressed higher order modes with a measured Q-factor as high as 7.8 × 106.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2012
PublisherOptical Society of America (OSA)
PagesCM1M.6
ISBN (Print)9781557529435
DOIs
StatePublished - Jan 1 2012
EventCLEO: Science and Innovations, CLEO_SI 2012 - San Jose, CA, United States
Duration: May 6 2012May 11 2012

Publication series

NameCLEO: Science and Innovations, CLEO_SI 2012

Other

OtherCLEO: Science and Innovations, CLEO_SI 2012
CountryUnited States
CitySan Jose, CA
Period5/6/125/11/12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Tada, K., Cohoon, G., Kieu, K., Mansuripur, M., & Norwood, R. A. (2012). Fabrication of high-Q microresonators using femtosecond laser micromachining. In CLEO: Science and Innovations, CLEO_SI 2012 (pp. CM1M.6). (CLEO: Science and Innovations, CLEO_SI 2012). Optical Society of America (OSA). https://doi.org/10.1364/cleo_si.2012.cm1m.6