Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada, Gregory Cohoon, Khanh Q Kieu, Masud Mansuripur, Robert A Norwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We report a novel technique to fabricate microdisk resonators using femtosecond laser micromachining. The resonators had suppressed higher order modes with a measured Q-factor as high as 7.8 × 106.

Original languageEnglish (US)
Title of host publicationCLEO: Science and Innovations, CLEO_SI 2012
Publication statusPublished - 2012
EventCLEO: Science and Innovations, CLEO_SI 2012 - San Jose, CA, United States
Duration: May 6 2012May 11 2012


OtherCLEO: Science and Innovations, CLEO_SI 2012
CountryUnited States
CitySan Jose, CA


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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