Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada, Gregory Cohoon, Khanh Q Kieu, Masud Mansuripur, Robert A Norwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report a novel technique to fabricate microdisk resonators using femtosecond laser micromachining. The resonators had suppressed higher order modes with a measured Q-factor as high as 7.8 × 106.

Original languageEnglish (US)
Title of host publicationCLEO: Science and Innovations, CLEO_SI 2012
StatePublished - 2012
EventCLEO: Science and Innovations, CLEO_SI 2012 - San Jose, CA, United States
Duration: May 6 2012May 11 2012

Other

OtherCLEO: Science and Innovations, CLEO_SI 2012
CountryUnited States
CitySan Jose, CA
Period5/6/125/11/12

Fingerprint

Micromachining
Ultrashort pulses
Resonators
Fabrication

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Fabrication of high-Q microresonators using femtosecond laser micromachining. / Tada, Kazunari; Cohoon, Gregory; Kieu, Khanh Q; Mansuripur, Masud; Norwood, Robert A.

CLEO: Science and Innovations, CLEO_SI 2012. 2012.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tada, K, Cohoon, G, Kieu, KQ, Mansuripur, M & Norwood, RA 2012, Fabrication of high-Q microresonators using femtosecond laser micromachining. in CLEO: Science and Innovations, CLEO_SI 2012. CLEO: Science and Innovations, CLEO_SI 2012, San Jose, CA, United States, 5/6/12.
Tada, Kazunari ; Cohoon, Gregory ; Kieu, Khanh Q ; Mansuripur, Masud ; Norwood, Robert A. / Fabrication of high-Q microresonators using femtosecond laser micromachining. CLEO: Science and Innovations, CLEO_SI 2012. 2012.
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