Fabrication of hybrid sol-gel glass diffractive elements

J. T. Rantala, P. Ayras, R. Levy, M. R. Descour, S. Honkanen, Nasser N Peyghambarian

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrates that also have a significant role in the component assembly. The synthesised material has a negative tone property under UV-radiation and they can be patterned by a conventional UV-lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages212-218
Number of pages7
Volume3620
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1999 Integrated Optics Devices III - San Jose, CA, USA
Duration: Jan 25 1999Jan 27 1999

Other

OtherProceedings of the 1999 Integrated Optics Devices III
CitySan Jose, CA, USA
Period1/25/991/27/99

Fingerprint

Sol-gels
gels
Fabrication
Glass
fabrication
glass
integrated optics
sol-gel processes
surface roughness
roughness
masks
lithography
assembly
lenses
optical properties
optimization
Diffractive optical elements
radiation
synthesis
diffraction

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Rantala, J. T., Ayras, P., Levy, R., Descour, M. R., Honkanen, S., & Peyghambarian, N. N. (1999). Fabrication of hybrid sol-gel glass diffractive elements. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3620, pp. 212-218). Society of Photo-Optical Instrumentation Engineers.

Fabrication of hybrid sol-gel glass diffractive elements. / Rantala, J. T.; Ayras, P.; Levy, R.; Descour, M. R.; Honkanen, S.; Peyghambarian, Nasser N.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3620 Society of Photo-Optical Instrumentation Engineers, 1999. p. 212-218.

Research output: Chapter in Book/Report/Conference proceedingChapter

Rantala, JT, Ayras, P, Levy, R, Descour, MR, Honkanen, S & Peyghambarian, NN 1999, Fabrication of hybrid sol-gel glass diffractive elements. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3620, Society of Photo-Optical Instrumentation Engineers, pp. 212-218, Proceedings of the 1999 Integrated Optics Devices III, San Jose, CA, USA, 1/25/99.
Rantala JT, Ayras P, Levy R, Descour MR, Honkanen S, Peyghambarian NN. Fabrication of hybrid sol-gel glass diffractive elements. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3620. Society of Photo-Optical Instrumentation Engineers. 1999. p. 212-218
Rantala, J. T. ; Ayras, P. ; Levy, R. ; Descour, M. R. ; Honkanen, S. ; Peyghambarian, Nasser N. / Fabrication of hybrid sol-gel glass diffractive elements. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3620 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 212-218
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