Fabrication of phase-change Ge2Sb2Te5 nano-rings

Cheng Hung Chu, Ming Lun Tseng, Chiun Da Shiue, Shuan Wei Chen, Hai Pang Chiang, Masud Mansuripur, Din Ping Tsai

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate.

Original languageEnglish (US)
Pages (from-to)12652-12657
Number of pages6
JournalOptics Express
Volume19
Issue number13
DOIs
StatePublished - Jun 20 2011

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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