Fabrication of polymer-derived ceramic nanostructures by imprint lithography

B. Duong, P. Gangopadhyay, J. Brent, S. Seraphin, R. O. Loutfy, J. Thomas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The conventional technique used for manufacturing miniaturized ceramic components is the powder route which typically does not allow the fabrication of feature sizes smaller than 0.1mm. With the availability of preceramic polymers, processed by various lithographic methods, it is possible to realize feature sizes below 1μm in size on polymer derived ceramics (PDC). Recently, sub-500nm structures have been fabricated by soft lithography which uses a sacrificial mold. This method is not commercially viable for the production of sub-100nm feature devices in large numbers due to the tedious pre- and post processing steps involved. Currently, no studies are present in the direction of simply printing the nanostructures below 100nm on Si 3N 4/SiO 2 to the best of our knowledge. Here, we present an easy method of fabricating sub-100nm photonic devices in polysilazane which is a precursor for preparing Si 3N 4 and SiC.

Original languageEnglish (US)
Title of host publicationTechnical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012
Pages761-763
Number of pages3
StatePublished - Aug 20 2012
EventNanotechnology 2012: Advanced Materials, CNTs, Particles, Films and Composites - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012 - Santa Clara, CA, United States
Duration: Jun 18 2012Jun 21 2012

Publication series

NameTechnical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012

Other

OtherNanotechnology 2012: Advanced Materials, CNTs, Particles, Films and Composites - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012
CountryUnited States
CitySanta Clara, CA
Period6/18/126/21/12

Keywords

  • Imprint lithography
  • Photonic structures
  • Polymer-derived ceramics
  • Sub-100nm features

ASJC Scopus subject areas

  • Ceramics and Composites
  • Surfaces, Coatings and Films

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  • Cite this

    Duong, B., Gangopadhyay, P., Brent, J., Seraphin, S., Loutfy, R. O., & Thomas, J. (2012). Fabrication of polymer-derived ceramic nanostructures by imprint lithography. In Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012 (pp. 761-763). (Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012).