Fabrication of Radially Symmetric Graded Porous Silicon using a Novel Cell Design

Mingrui Zhao, Manish K Keswani

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A contactless method using a novel design of the experimental cell for formation of porous silicon with morphological gradient is reported. Fabricated porous silicon layers show a large distribution in porosity, pore size and depth along the radius of the samples. Symmetrical arrangements of morphology gradient were successfully formulated radially on porous films and the formation was attributed to decreasing current density radially inward on the silicon surface exposed to Triton ® X-100 containing HF based etchant solution. Increasing the surfactant concentration increases the pore depth gradient but has a reverse effect on the pore size distribution. Interestingly, when dimethyl sulfoxide was used instead of Triton ® X-100 in the etchant solution, no such morphological gradients were observed and a homogeneous porous film was formed.

Original languageEnglish (US)
Article number24864
JournalScientific Reports
Volume6
DOIs
StatePublished - Apr 22 2016

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Porous silicon
Octoxynol
Pore size
Fabrication
Silicon
Dimethyl Sulfoxide
Surface-Active Agents
Current density
Porosity

ASJC Scopus subject areas

  • General

Cite this

Fabrication of Radially Symmetric Graded Porous Silicon using a Novel Cell Design. / Zhao, Mingrui; Keswani, Manish K.

In: Scientific Reports, Vol. 6, 24864, 22.04.2016.

Research output: Contribution to journalArticle

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