Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography

Chris Summitt, Sunglin Wang, Soha Namnabat, Lee Johnson, Tom Milster, Yuzuru Takashima

Research output: Research - peer-reviewArticle

Abstract

We report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 μm wavelength, with mirror angle of 45 ± 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously.

LanguageEnglish (US)
Pages17960-17970
Number of pages11
JournalOptics Express
Volume25
Issue number15
DOIs
StatePublished - Jul 24 2017

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gray scale
couplers
lithography
mirrors
fabrication
polymers
numerical aperture
blanks
insertion loss
buffers
waveguides
wavelengths
lasers

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography. / Summitt, Chris; Wang, Sunglin; Namnabat, Soha; Johnson, Lee; Milster, Tom; Takashima, Yuzuru.

In: Optics Express, Vol. 25, No. 15, 24.07.2017, p. 17960-17970.

Research output: Research - peer-reviewArticle

Summitt C, Wang S, Namnabat S, Johnson L, Milster T, Takashima Y. Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography. Optics Express. 2017 Jul 24;25(15):17960-17970. Available from, DOI: 10.1364/OE.25.017960
Summitt, Chris ; Wang, Sunglin ; Namnabat, Soha ; Johnson, Lee ; Milster, Tom ; Takashima, Yuzuru. / Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography. In: Optics Express. 2017 ; Vol. 25, No. 15. pp. 17960-17970
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