Fast, low insertion-loss optical switch using lithographically defined electromagnetic microactuators and polymeric passive alignment structures

Robert A Norwood, J. Holman, L. W. Shacklette, S. Emo, N. Tabatabaie, H. Guckel

Research output: Contribution to journalArticle

4 Scopus citations


A micro-optoelectromechanical switch that combines microactuator technology developed via the Lithographie Galvanformung Abformung process with lithographically defined polymeric alignment elements is described. The multimode optical switch achieves submillisecond switching times, low insertion loss (<1 dB), low cross talk (<70 dB), low voltage (3 V), and wavelength independence.

Original languageEnglish (US)
Pages (from-to)3187-3189
Number of pages3
JournalApplied Physics Letters
Issue number22
Publication statusPublished - 1998
Externally publishedYes


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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