Fast optical profiler

Takeshi Nakazawa, Jose Sasian, Francy Abraham

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present the optical design of a fast single shot profiler. A depth resolution of 0.6 micrometer RMS was achieved in an area of 1.2x0.9 mm with a 0.5 second data acquisition time.

Original languageEnglish (US)
Title of host publicationOptical Fabrication and Testing, OFT 2010
StatePublished - Dec 1 2010
EventOptical Fabrication and Testing, OFT 2010 - Jackson Hole, WY, United States
Duration: Jun 13 2010Jun 17 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherOptical Fabrication and Testing, OFT 2010
Country/TerritoryUnited States
CityJackson Hole, WY
Period6/13/106/17/10

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Fingerprint

Dive into the research topics of 'Fast optical profiler'. Together they form a unique fingerprint.

Cite this