Fast optical profiler

Takeshi Nakazawa, Jose Sasian, Francy Abraham

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present the optical design of a fast single shot profiler. A depth resolution of 0.6 micrometer RMS was achieved in an area of 1.2x0.9 mm with a 0.5 second data acquisition time.

Original languageEnglish (US)
Title of host publicationOptical Fabrication and Testing, OFT 2010
StatePublished - Dec 1 2010
EventOptical Fabrication and Testing, OFT 2010 - Jackson Hole, WY, United States
Duration: Jun 13 2010Jun 17 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherOptical Fabrication and Testing, OFT 2010
CountryUnited States
CityJackson Hole, WY
Period6/13/106/17/10

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Nakazawa, T., Sasian, J., & Abraham, F. (2010). Fast optical profiler. In Optical Fabrication and Testing, OFT 2010 (Optics InfoBase Conference Papers).