Fast optical profiler

Takeshi Nakazawa, Jose M Sasian, Francy Abraham

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present the optical design of a fast single shot profiler. A depth resolution of 0.6 micrometer RMS was achieved in an area of 1.2x0.9 mm with a 0.5 second data acquisition time.

Original languageEnglish (US)
Title of host publicationOptics InfoBase Conference Papers
StatePublished - 2010
EventOptical Fabrication and Testing, OFT 2010 - Jackson Hole, WY, United States
Duration: Jun 13 2010Jun 17 2010

Other

OtherOptical Fabrication and Testing, OFT 2010
CountryUnited States
CityJackson Hole, WY
Period6/13/106/17/10

Fingerprint

Optical design
shot
data acquisition
micrometers
Data acquisition

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Nakazawa, T., Sasian, J. M., & Abraham, F. (2010). Fast optical profiler. In Optics InfoBase Conference Papers

Fast optical profiler. / Nakazawa, Takeshi; Sasian, Jose M; Abraham, Francy.

Optics InfoBase Conference Papers. 2010.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakazawa, T, Sasian, JM & Abraham, F 2010, Fast optical profiler. in Optics InfoBase Conference Papers. Optical Fabrication and Testing, OFT 2010, Jackson Hole, WY, United States, 6/13/10.
Nakazawa T, Sasian JM, Abraham F. Fast optical profiler. In Optics InfoBase Conference Papers. 2010
Nakazawa, Takeshi ; Sasian, Jose M ; Abraham, Francy. / Fast optical profiler. Optics InfoBase Conference Papers. 2010.
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