Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Daodang Wang, Zhichao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Jufeng Zhao, Linhai Mo, Wei Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of pointdiffraction wavefront obtained in the experiment is in the order of 1×10-4 (the wavelength is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 μm. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 μm, convergence rate (∼90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.

Original languageEnglish (US)
Title of host publicationOptical Measurement Systems for Industrial Inspection X
EditorsPeter Lehmann, Armando Albertazzi Goncalves, Wolfgang Osten
PublisherSPIE
ISBN (Electronic)9781510611030
DOIs
StatePublished - 2017
EventOptical Measurement Systems for Industrial Inspection X 2017 - Munich, Germany
Duration: Jun 26 2017Jun 29 2017

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10329
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherOptical Measurement Systems for Industrial Inspection X 2017
CountryGermany
CityMunich
Period6/26/176/29/17

Keywords

  • Absolute displacement measurement
  • fast searching particle swarm algorithm
  • point-diffraction interferometer
  • spherical wavefront error

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Wang, D., Wang, Z., Liang, R., Kong, M., Zhao, J., Zhao, J., Mo, L., & Li, W. (2017). Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer. In P. Lehmann, A. A. Goncalves, & W. Osten (Eds.), Optical Measurement Systems for Industrial Inspection X [1032937] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10329). SPIE. https://doi.org/10.1117/12.2268052