Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Daodang Wang, Zhichao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Jufeng Zhao, Linhai Mo, Wei Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of pointdiffraction wavefront obtained in the experiment is in the order of 1×10-4 (the wavelength is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 μm. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 μm, convergence rate (∼90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.

Original languageEnglish (US)
Title of host publicationOptical Measurement Systems for Industrial Inspection X
PublisherSPIE
Volume10329
ISBN (Electronic)9781510611030
DOIs
StatePublished - 2017
EventOptical Measurement Systems for Industrial Inspection X 2017 - Munich, Germany
Duration: Jun 26 2017Jun 29 2017

Other

OtherOptical Measurement Systems for Industrial Inspection X 2017
CountryGermany
CityMunich
Period6/26/176/29/17

Fingerprint

Interferometer
Interferometers
Diffraction
interferometers
apertures
Fiber
fibers
Fibers
diffraction
Wavefronts
Wave Front
Three-dimensional
Particle swarm optimization (PSO)
Displacement Measurement
Displacement measurement
Large Displacements
optimization
displacement measurement
rails
Numerical Comparisons

Keywords

  • Absolute displacement measurement
  • fast searching particle swarm algorithm
  • point-diffraction interferometer
  • spherical wavefront error

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Wang, D., Wang, Z., Liang, R., Kong, M., Zhao, J., Zhao, J., ... Li, W. (2017). Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer. In Optical Measurement Systems for Industrial Inspection X (Vol. 10329). [1032937] SPIE. https://doi.org/10.1117/12.2268052

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer. / Wang, Daodang; Wang, Zhichao; Liang, Rongguang; Kong, Ming; Zhao, Jun; Zhao, Jufeng; Mo, Linhai; Li, Wei.

Optical Measurement Systems for Industrial Inspection X. Vol. 10329 SPIE, 2017. 1032937.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wang, D, Wang, Z, Liang, R, Kong, M, Zhao, J, Zhao, J, Mo, L & Li, W 2017, Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer. in Optical Measurement Systems for Industrial Inspection X. vol. 10329, 1032937, SPIE, Optical Measurement Systems for Industrial Inspection X 2017, Munich, Germany, 6/26/17. https://doi.org/10.1117/12.2268052
Wang D, Wang Z, Liang R, Kong M, Zhao J, Zhao J et al. Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer. In Optical Measurement Systems for Industrial Inspection X. Vol. 10329. SPIE. 2017. 1032937 https://doi.org/10.1117/12.2268052
Wang, Daodang ; Wang, Zhichao ; Liang, Rongguang ; Kong, Ming ; Zhao, Jun ; Zhao, Jufeng ; Mo, Linhai ; Li, Wei. / Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer. Optical Measurement Systems for Industrial Inspection X. Vol. 10329 SPIE, 2017.
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