Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization

G. Teowee, E. L. Quackenbush, C. D. Baertlein, J. M. Boulton, Donald R Uhlmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The PZT-substrate or PZT-electrode interface can affect the FE properties and specifically the fatigue behaviour. Typical Pt-PZT-Pt capacitors exhibited fatigue resistance up to 10x - 109 cycles, while RuO2, La0.5Sr0.5CoO3 and YBa2Cu3O7 electrodes have been reported in literature to yield fatigue-free devices up to 1011 - 1012 cycles. In an early study which compared the fatigue behaviour of bulk PLZT ceramics with various metal electrodes, it was found that in offered the best fatigue performance (up to 109 cycles). A series of sol-gel derived PZT 53/47 films were fired to 700C to achieve single-phase FE perovskite films. Bottom electrode (or the substrate) consisted of sputtered Pt on oxidized Si wafers. Monolithic capacitors were obtained by depositing top electrodes of Ag, Au, Au-Pd, Pd and Pt. All the capacitors exhibited fatigue, manifested by lower values of Pr, Ec and εr but higher leakage currents after cycling.

Original languageEnglish (US)
Title of host publicationIEEE International Symposium on Applications of Ferroelectrics
Editors Anon
PublisherIEEE
Pages523-526
Number of pages4
StatePublished - 1994
Externally publishedYes
EventProceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics - University Park, PA, USA
Duration: Aug 7 1994Aug 10 1994

Other

OtherProceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics
CityUniversity Park, PA, USA
Period8/7/948/10/94

Fingerprint

Metallizing
Capacitors
Metals
Fatigue of materials
Electrodes
Substrates
Leakage currents
Perovskite
Sol-gels

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

Cite this

Teowee, G., Quackenbush, E. L., Baertlein, C. D., Boulton, J. M., & Uhlmann, D. R. (1994). Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization. In Anon (Ed.), IEEE International Symposium on Applications of Ferroelectrics (pp. 523-526). IEEE.

Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization. / Teowee, G.; Quackenbush, E. L.; Baertlein, C. D.; Boulton, J. M.; Uhlmann, Donald R.

IEEE International Symposium on Applications of Ferroelectrics. ed. / Anon. IEEE, 1994. p. 523-526.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Teowee, G, Quackenbush, EL, Baertlein, CD, Boulton, JM & Uhlmann, DR 1994, Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization. in Anon (ed.), IEEE International Symposium on Applications of Ferroelectrics. IEEE, pp. 523-526, Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics, University Park, PA, USA, 8/7/94.
Teowee G, Quackenbush EL, Baertlein CD, Boulton JM, Uhlmann DR. Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization. In Anon, editor, IEEE International Symposium on Applications of Ferroelectrics. IEEE. 1994. p. 523-526
Teowee, G. ; Quackenbush, E. L. ; Baertlein, C. D. ; Boulton, J. M. ; Uhlmann, Donald R. / Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization. IEEE International Symposium on Applications of Ferroelectrics. editor / Anon. IEEE, 1994. pp. 523-526
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