Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization

G. Teowee, E. L. Quackenbush, C. D. Baertlein, J. M. Boulton, D. R. Uhlmann

Research output: Contribution to conferencePaper

1 Scopus citations

Abstract

The PZT-substrate or PZT-electrode interface can affect the FE properties and specifically the fatigue behaviour. Typical Pt-PZT-Pt capacitors exhibited fatigue resistance up to 10x - 109 cycles, while RuO2, La0.5Sr0.5CoO3 and YBa2Cu3O7 electrodes have been reported in literature to yield fatigue-free devices up to 1011 - 1012 cycles. In an early study which compared the fatigue behaviour of bulk PLZT ceramics with various metal electrodes, it was found that in offered the best fatigue performance (up to 109 cycles). A series of sol-gel derived PZT 53/47 films were fired to 700C to achieve single-phase FE perovskite films. Bottom electrode (or the substrate) consisted of sputtered Pt on oxidized Si wafers. Monolithic capacitors were obtained by depositing top electrodes of Ag, Au, Au-Pd, Pd and Pt. All the capacitors exhibited fatigue, manifested by lower values of Pr, Ec and εr but higher leakage currents after cycling.

Original languageEnglish (US)
Pages523-526
Number of pages4
StatePublished - Dec 1 1994
Externally publishedYes
EventProceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics - University Park, PA, USA
Duration: Aug 7 1994Aug 10 1994

Other

OtherProceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics
CityUniversity Park, PA, USA
Period8/7/948/10/94

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Teowee, G., Quackenbush, E. L., Baertlein, C. D., Boulton, J. M., & Uhlmann, D. R. (1994). Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization. 523-526. Paper presented at Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics, University Park, PA, USA, .