Feasibility of a Real-Time Method in Determine the Extent of Pad Break-In during Copper Chemical Mechanical Planarization

Ruochen Han, Yasa Sampurno, Ara Philipossian

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint Dive into the research topics of 'Feasibility of a Real-Time Method in Determine the Extent of Pad Break-In during Copper Chemical Mechanical Planarization'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy