FEM simulation of micro-rotating-structures and their applications in measurement of residual stresses in thin films

Xin Zhang, Tong Yi Zhang, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

FEM simulation of micro-rotating-structures was performed for local measurement of residual stresses in thin films. A sensitivity factor is introduced, studied and tabulated from the simulation results. The residual stress can be evaluated from the rotating deflection, the lengths of rotating and fixed beams, and the sensitivity factor. The micro-structure technique was applied to measure residual stresses in both silicon nitride and polysilicon thin films, before and after rapid thermal annealing (RTA), and further confirmed by wafer curvature method. Residual stresses in polysilicon films at different RTA stages were also characterized by micro-Raman spectroscopy (MRS). The experimental results indicate that micro-rotating-structures indeed have the ability to measure spatially and locally residual stresses in MEMS thin films with appropriate sensitivities.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsR.L. Crane, J.D. Achenbach, S.P. Shah, T.E. Matikas, P. Khuri-Yakub, R.S. Gilmore
PublisherMRS
Pages21-26
Number of pages6
Volume505
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1997 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 30 1997Dec 4 1997

Other

OtherProceedings of the 1997 MRS Fall Meeting
CityBoston, MA, USA
Period11/30/9712/4/97

Fingerprint

Residual stresses
Finite element method
Thin films
Rapid thermal annealing
Polysilicon
Silicon nitride
MEMS
Raman spectroscopy
Microstructure

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Zhang, X., Zhang, T. Y., & Zohar, Y. (1998). FEM simulation of micro-rotating-structures and their applications in measurement of residual stresses in thin films. In R. L. Crane, J. D. Achenbach, S. P. Shah, T. E. Matikas, P. Khuri-Yakub, & R. S. Gilmore (Eds.), Materials Research Society Symposium - Proceedings (Vol. 505, pp. 21-26). MRS.

FEM simulation of micro-rotating-structures and their applications in measurement of residual stresses in thin films. / Zhang, Xin; Zhang, Tong Yi; Zohar, Yitshak.

Materials Research Society Symposium - Proceedings. ed. / R.L. Crane; J.D. Achenbach; S.P. Shah; T.E. Matikas; P. Khuri-Yakub; R.S. Gilmore. Vol. 505 MRS, 1998. p. 21-26.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhang, X, Zhang, TY & Zohar, Y 1998, FEM simulation of micro-rotating-structures and their applications in measurement of residual stresses in thin films. in RL Crane, JD Achenbach, SP Shah, TE Matikas, P Khuri-Yakub & RS Gilmore (eds), Materials Research Society Symposium - Proceedings. vol. 505, MRS, pp. 21-26, Proceedings of the 1997 MRS Fall Meeting, Boston, MA, USA, 11/30/97.
Zhang X, Zhang TY, Zohar Y. FEM simulation of micro-rotating-structures and their applications in measurement of residual stresses in thin films. In Crane RL, Achenbach JD, Shah SP, Matikas TE, Khuri-Yakub P, Gilmore RS, editors, Materials Research Society Symposium - Proceedings. Vol. 505. MRS. 1998. p. 21-26
Zhang, Xin ; Zhang, Tong Yi ; Zohar, Yitshak. / FEM simulation of micro-rotating-structures and their applications in measurement of residual stresses in thin films. Materials Research Society Symposium - Proceedings. editor / R.L. Crane ; J.D. Achenbach ; S.P. Shah ; T.E. Matikas ; P. Khuri-Yakub ; R.S. Gilmore. Vol. 505 MRS, 1998. pp. 21-26
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