Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams

Xiao Long Liu, Weibo Cheng, Pavel G Polynkin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Femtosecond laser micromachining on back surface have been investigated experimentally using simultaneously spatially and temporally focused (SSTF) vortex beams. Uniform ring-shape ablations have been made on back surface of borosilicate glass. The feasibility of laser micromachining using femtosecond SSTF vortex beam has been demonstrated.

Original languageEnglish (US)
Title of host publication2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
Volume2017-January
ISBN (Electronic)9781509062904
DOIs
StatePublished - Nov 22 2017
Event2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017 - Singapore, Singapore
Duration: Jul 31 2017Aug 4 2017

Other

Other2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017
CountrySingapore
CitySingapore
Period7/31/178/4/17

Keywords

  • Laser Micromachining
  • Simultaneously Spatially And Temporally Focused Beam
  • Vortex Beam

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Liu, X. L., Cheng, W., & Polynkin, P. G. (2017). Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams. In 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017 (Vol. 2017-January, pp. 1-2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2017.8118968