Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams

Xiao Long Liu; Weibo Cheng; Pavel G Polynkin

doi:10.1109/CLEOPR.2017.8118968

Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams

Xiao Long Liu, Weibo Cheng, Pavel G Polynkin

Optical Sciences, College of

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Femtosecond laser micromachining on back surface have been investigated experimentally using simultaneously spatially and temporally focused (SSTF) vortex beams. Uniform ring-shape ablations have been made on back surface of borosilicate glass. The feasibility of laser micromachining using femtosecond SSTF vortex beam has been demonstrated.

Original language	English (US)
Title of host publication	2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-2
Number of pages	2
Volume	2017-January
ISBN (Electronic)	9781509062904
DOIs	https://doi.org/10.1109/CLEOPR.2017.8118968
Publication status	Published - Nov 22 2017
Event	2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017 - Singapore, Singapore Duration: Jul 31 2017 → Aug 4 2017

Other

Other	2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017
Country	Singapore
City	Singapore
Period	7/31/17 → 8/4/17

Fingerprint

Keywords

Laser Micromachining
Simultaneously Spatially And Temporally Focused Beam
Vortex Beam

ASJC Scopus subject areas

Computer Networks and Communications
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Cite this

Liu, X. L., Cheng, W., & Polynkin, P. G. (2017). Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams. In 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017 (Vol. 2017-January, pp. 1-2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2017.8118968

Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams. / Liu, Xiao Long; Cheng, Weibo; Polynkin, Pavel G.

2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017. Vol. 2017-January Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-2.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Liu, XL, Cheng, W & Polynkin, PG 2017, Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams. in 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017. vol. 2017-January, Institute of Electrical and Electronics Engineers Inc., pp. 1-2, 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017, Singapore, Singapore, 7/31/17. https://doi.org/10.1109/CLEOPR.2017.8118968

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Access to Document

10.1109/CLEOPR.2017.8118968