Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams

Liu Xiaolong, Weibo Cheng, Pavel G Polynkin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Femtosecond laser micromachining on back surface have been investigated experimentally using simultaneously spatially and temporally focused (SSTF) vortex beams. Uniform ring-shape ablations have been made on back surface of borosilicate glass. The feasibility of laser micromachining using femtosecond SSTF vortex beam has been demonstrated.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
PublisherOSA - The Optical Society
VolumePart F122-CLEOPR 2017
ISBN (Electronic)9781557528209
StatePublished - Jan 1 2017
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore
Duration: Jul 31 2017Aug 4 2017

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
CountrySingapore
CitySingapore
Period7/31/178/4/17

Keywords

  • Laser micromachining
  • Simultaneously spatially and temporally focused beam
  • Vortex beam

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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  • Cite this

    Xiaolong, L., Cheng, W., & Polynkin, P. G. (2017). Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 (Vol. Part F122-CLEOPR 2017). [s2049] OSA - The Optical Society.