Ferroelectric thin film bismuth titanate prepared from acetate precursor

Yanxia Lu, David T. Hoelzer, Walter A. Schulze, Bruce Tuttle, B. G. Potter

Research output: Contribution to conferencePaperpeer-review

Abstract

Bismuth Titanate (Bi4Ti3O12) thin films were fabricated by spin coat deposition - rapid thermal processing (RTP) technique. Acetate derived solution for deposition was synthesized by blending dissolved bismuth acetate in aqueous acetic acid, and then adding with titanium acetate. A series of electrically insulating, semiconducting and conducting substrates were evaluated for Bi4Ti3O12 films deposition. While X-ray diffraction and TEM analyses indicated that the initial perovskite crystallization temperature was 500°C or less for these Bi4Ti3O12 films, a 700°C crystallization treatment was used to obtain single phase perovskite films. Bi4Ti3O12 film crystallographic orientation was shown to depend on three factors: substrate, the number of coating layers and thermal processing. While preferred c-direction orientation was observed for films deposited on silver foil substrates, preferred a-direction orientation was obtained for films deposited on both Si and Pt coated Si wafers. The films were dense, smooth, crack-free and had grain sizes ranging from 20 nm to 400 nm. Film thickness and refractive index were determined using a combination of ellipsometry, waveguide refractometry and TEM measurements. Both low field dielectric and ferroelectric properties were measured for an 800 nm thick film deposited on a Pt coated MgO substrate. A remanent polarization of 38 μC/cm2 and a coercive field of 98 kv/cm was measured for this film that was crystallized at 700°C.

Original languageEnglish (US)
Pages348-351
Number of pages4
StatePublished - Dec 1 1994
Externally publishedYes
EventProceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics - University Park, PA, USA
Duration: Aug 7 1994Aug 10 1994

Other

OtherProceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics
CityUniversity Park, PA, USA
Period8/7/948/10/94

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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