Figure measurement of a large optical flat with a Fizeau interferometer and stitching technique

Chunyu Zhao, Robert A. Sprowl, Michael Bray, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

21 Scopus citations

Abstract

Large flat mirrors can be measured by using subaperture Fizeau interferometer and stitching the data. We have implemented such a system that can efficiently and accurately measure flat mirrors several meters in diameter using a 1 meter sub-aperture instantaneous Fizeau interferometer, coupled with sophisticated analysis software. The 1-m aperture optical system uses a fused silica test plate, reflective collimator, and commercial instantaneous interferometer. Collimator errors, mapping distortion, surface errors in the test plate, and other systematic effects were measured and compensated for individual measurements. Numerous individual maps were stitched together to determine the global shape of a 2-m class flat.

Original languageEnglish (US)
Title of host publicationInterferometry XIII
Subtitle of host publicationApplications
DOIs
StatePublished - Oct 18 2006
EventInterferometry XIII: Applications - San Diego CA, United States
Duration: Aug 16 2007Aug 17 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6293
ISSN (Print)0277-786X

Other

OtherInterferometry XIII: Applications
CountryUnited States
CitySan Diego CA
Period8/16/078/17/07

    Fingerprint

Keywords

  • Fizeau interferometry
  • Optical flat
  • Optical testing
  • Stitching

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Zhao, C., Sprowl, R. A., Bray, M., & Burge, J. H. (2006). Figure measurement of a large optical flat with a Fizeau interferometer and stitching technique. In Interferometry XIII: Applications [62930K] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6293). https://doi.org/10.1117/12.681234